Scanning Electron Microscopes (SEM)

For more than four decades, JEOL scanning electron microscopes have been indispensable tools for research, development and industrial applications of all types. More than 8000 JEOL scanning electron microscopes have been installed worldwide.

Scanning electron microscopes are constantly opening up new application fields, as for example in nanotechnology or biology. New production processes in the nanometer range have progressed significantly, which means, it was also necessary for new SEM technologies to keep up.

JEOL therefore develops and produces customized instruments for the respective application fields. The product line consists of several equipment series, which differ in resolution and configuration.

Scanning Electron Microscopes with Tungsten or LaB₆ cathode
The instruments in this series are very easy to operate while providing a high electron optical performance. A variety of specimen chambers, an integrated element analytics (EDS) and low vacuum control (LV) are among the key options. The LV-option allows for variable chamber vacuum and thereby enables simplified imaging and X-ray analytics of moist, non-conducting and unprepared specimens.

Atmospheric Scanning Electron Microscope combined with light Optical Microscope
For the first time, a scanning electron microscope has been combined with a complete light optical microscope to receive and combine light and electron optical information simultaneously from an identical specimen range. A variety of application options, especially in cell and neurobiology, is possible as the specimens can be analyzed at atmospheric pressure directly in the fluids.

With a significantly smaller beam diameter with increased current density, field emission cathodes provide a higher resolution than instruments with tungsten or LaB6 cathode.
JEOL offers two different options for the field emission source: Sources based on the Schottky principle and cold field emission sources.

Scanning Electron Microscopes with thermally supported Field Emission (Schottky-FEG SEM)
With its thermally supported field emissions, the Schottky source provides a high, long-term stable specimen current.
Application fields include fast and precise chemical analytics (EDS/WDS), crystallographic analyses (EBSD) and qualitative high performance electron beam lithography.
However, the greater energy width of the heated sources gives rise to restrictions in the achievable image resolution.

Scanning Electron Microscopes with Cold Field Emission Cathode (CFEG)
The cold field emission cathode, if compared with a Schottky source, has a narrower energy spread and a higher direction beam value (brightness) in the electron beam, thus improving the focus, especially at low acceleration voltages.
Extremely high-resolution in imaging and analytics (EDS) is guaranteed due to the extremely small beam diameters, especially at low acceleration voltages.

With the JSM-7700F in the CFEG-SEM series, JEOL is the first manufacturer to offer a model on the world market with correction of spherical and chromatic aberration for the object lens.

All JEOL REMs with tungsten or LaB6 cathode are available, ex-factory, with a JEOL EDS system fully integrated into the user interface. The model designation will, in this case, include the A add-on for analytics.

Alternately, EDS systems from other manufacturers can also be installed.

Subject to technical changes; errors excepted. All brand names that appear in the text are registered trademarks of the manufacturers.